This isn't exactly a plant tour, but these Technical Tutorials made by Applied Materials have some good information on how semiconductors are made. Some of the presentations are a little long, but you'll learn more than you ever wanted to know about the steps required to manufacture a chip. The two directly linked tutorials are How to Make a Chip and How to Make a Flat Panel Display respectively. Other presentations available at the Applied Materials How We Do It page include:
What is Nanomanufacturing Technology
What is Solar Electric Power,
How to Make a Transistor,
How Clean is Clean,
Build a Transistor Challenge ,
How to Make a Chip,
How to Make a Flat Panel Display
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